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Instrument Equipment
JTL Crystal Furnace
Single Crystal Pulling Furnace
Single Crystal Pulling Furnace

Structural and Performance Description

      The SG-GJL800 Single Crystal Pulling Furnace mainly consists of the following parts:

Furnace Body:

The vacuum furnace chamber has dimensions of Φ400*700mm, with a double-layer water-cooled wall made of 304 stainless steel. The furnace door opens sideways and is equipped with a water-cooled quartz observation window.

Vacuum System:

To meet user process requirements, a diffusion pump unit is provided.

The vacuum valve is a vacuum butterfly valve, and an electromagnetic vacuum differential pressure release valve is installed at the mechanical pump's suction port.

 Vacuum Gauge: 

The vacuum gauge is used to measure the vacuum degree. The equipment is equipped with both a pressure vacuum gauge (installed on the vacuum pipeline connected to the furnace body) and a thermocouple vacuum gauge. A vacuum silicon tube is installed on the pipeline connecting the furnace's exhaust port and the vacuum butterfly valve to measure the vacuum degree.

Pulling Mechanism: 

The mechanism adopts a ball screw and guide rail to drive the linear motion of the moving platform. Weight control is achieved using a strain gauge sensor. The pulling speed and rotation speed are set on the touch screen, which also features fault alarms, alarm records, data recording, automatic power-off handling, overpressure alarms, etc. Data can be copied to a USB drive for computer analysis.

Heating System: 

The heat shield is made of graphite and carbon felt, adopting a circular structure. The heater, also of a circular graphite structure, is installed around the circular heat shield to form an integral unit. The heater is connected to the graphite heating element using copper electrodes, facilitating easy disassembly and maintenance.

Electric Control System:

The system features a Kunlun Tongtai 10-inch LCD touch screen for data storage and output. Data can be copied to a computer via a USB drive, and real-time curves are displayed on the screen. This makes program setting faster, equipment status more intuitive, and operation more convenient through a graphic and text interface. Data can be copied to a computer via the USB interface for long-term storage, and multiple heating curves can be preset. The temperature control precision is ±1℃. Combining expert modules and control algorithms achieves precise temperature control and effectively resisstant temperature overshoot. The over-temperature alarm system features main circuit cutoff, audiovisual alarms, and automatic recovery and removal functions.

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Shanghai Institute of Optics and Fine Mechanics.CAS, Chinese Academy of Sciences Opto Electronic Material & Equipment Dept
Address:No. 200 Zhaoxian ROAD,JIADING DISTRICT,SHANGHAI 201800,CHINA Tel:021-69522126 Fax:021-69522153
Technical Support:Qingyun Software