
Production Description:
The equipment is mainly used in optoelectronic devices, new energy, solar cells, integrated circuit manufacturing and semiconductor materials for diffusion, oxidation, annealing and deposition processes, can be used for various process sizes. The equipment system has a precise microcomputer control system, a gas control system, a variety of fault alarm and safety interlock functions.
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Address:200 Zhaoxian ROAD,JIADING DISTRICT,SHANGHAI 201800,CHINA
Tel:021-69522126
Fax:021-69513319
HOTLINE:
400-9200-165